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Browsing by Author "Teerlinck, I"

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    A study of the influence of typical wet chemical treatments on the germanium wafer surface

    Onsia, Bart  
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    Conard, Thierry  
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    De Gendt, Stefan  
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    Heyns, Marc  
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    Hoflijk, Ilse  
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    Mertens, Paul  
    Oral presentation
    2004, 7th International Symposium on Ultra Clean Processing of Silicon Surfaces - UCPSS
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    Germanium deep-sub micron PMOS transistors with etched TaN metal gate on a high-k dielectric, fabricated in a 200mm prototyping line

    Meuris, Marc  
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    De Jaeger, Brice  
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    Kubicek, Stefan  
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    Verheyen, Peter  
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    Van Steenbergen, Jan  
    Proceedings paper
    2004, SiGe: Materials, Processing, and Devices. Proceedings of the 1st International Sympsoium, 3/10/2004, p.693-700
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    The future of high-k on pure germanium and its importance for Ge CMOS

    Meuris, Marc  
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    Delabie, Annelies  
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    Van Elshocht, Sven  
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    Kubicek, Stefan  
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    Verheyen, Peter  
    Proceedings paper
    2004, Program and Abstracts 2nd International SiGe Technology and Device Meeting - ISDTM, 16/05/2004, p.91-92
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    The future of high-k on pure germanium and its importance for Ge CMOS

    Meuris, Marc  
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    Delabie, Annelies  
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    Van Elshocht, Sven  
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    Kubicek, Stefan  
    ;
    Verheyen, Peter  
    Journal article
    2005, Materials Science in Semiconductor Processing, (8) 1_3, p.203-207

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