Publication:

The future of high-k on pure germanium and its importance for Ge CMOS

Date

2005
Journal article
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Author(s)

Meuris, Marc  
;
Delabie, Annelies  
;
Van Elshocht, Sven  
;
Kubicek, Stefan  
;
Verheyen, Peter  
;
De Jaeger, Brice  
;
Van Steenbergen, Jan  
;
Winderickx, Gillis  
;
Van Moorhem, Els  
;
Puurunen, R.
;
Brijs, Bert
;
Caymax, Matty  
;
Conard, Thierry  
;
Richard, Olivier  
;
Vandervorst, Wilfried  
;
Zhao, Chao
;
De Gendt, Stefan  
;
Schram, Tom  
;
Chiarella, Thomas  
;
Onsia, Bart  
;
Teerlinck, I
;
Houssa, Michel  
;
Mertens, Paul  
;
Raskin, G.
;
Mijlemans, P.
;
Biesemans, Serge  
;
Heyns, Marc  

Journal

Materials Science in Semiconductor Processing

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1927 since deposited on 2021-10-16
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