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Browsing by Author "Telecky, Alan"

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    Metal oxide EUV photoresist performance for N7 relevant patterns and processes

    Stowers, Jason
    ;
    Anderson, Jeremy
    ;
    Cardineau, Brian
    ;
    Clark, Benjamin
    ;
    De Schepper, Peter  
    Proceedings paper
    2016, Advances in Patterning Materials and Processes XXXIII, 21/02/2016, p.977904

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