Publication:

Metal oxide EUV photoresist performance for N7 relevant patterns and processes

Date

2016

Proceedings Paper

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Files

34343.pdf 2.52 MB

Author(s)

;

Anderson, Jeremy

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Cardineau, Brian

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Clark, Benjamin

;

De Schepper, Peter

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;

;

Kocsis, Michael

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Meyers, Stephen

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;

Grenville, Andrew

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De Simone, Danilo

;

Gillijns, Werner

;

Vandenberghe, Geert

Metrics

1990 since deposited on 2021-10-23

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Acq. date: 2025-12-11