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Browsing by Author "Theodore, D."

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    Improved thermal stability of Ni-silicides on Si:C epitaxial layers

    Machkaoutsan, Vladimir  
    ;
    Mertens, Sofie  
    ;
    Bauer, R.
    ;
    Lauwers, Anne  
    ;
    Verheyden, Kurt
    Journal article
    2007, Microelectronic Engineering, 84, p.2542-2546

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