Improved thermal stability of Ni-silicides on Si:C epitaxial layers

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Author(s)

Machkaoutsan, Vladimir

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Verheyden, Kurt

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Vanormelingen, Koen

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Verheyen, Peter

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Jakschik, Stefan

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Absil, Philippe

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Granneman, E.H.A.

Journal

Microelectronic Engineering

Metrics

1893 since deposited on 2021-10-16

Acq. date: 2025-10-23