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Improved thermal stability of Ni-silicides on Si:C epitaxial layers
Publication:
Improved thermal stability of Ni-silicides on Si:C epitaxial layers
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Date
2007
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Machkaoutsan, Vladimir
;
Mertens, Sofie
;
Bauer, R.
;
Lauwers, Anne
;
Verheyden, Kurt
;
Vanormelingen, Koen
;
Verheyen, Peter
;
Loo, Roger
;
Caymax, Matty
;
Jakschik, Stefan
;
Theodore, D.
;
Absil, Philippe
;
Thomas, S.
;
Granneman, E.H.A.
Journal
Microelectronic Engineering
Abstract
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1897
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Acq. date: 2025-12-09
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Metrics
Views
1897
since deposited on 2021-10-16
1
last month
Acq. date: 2025-12-09
Citations