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Browsing by Author "Thirupapulyur, S."

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    Ultra-shallow junctions formed by C co-implantation with spkie plus sub-melt laser annealing

    Felch, S.B.
    ;
    Collart, E.
    ;
    Parihar, V.
    ;
    Thirupapulyur, S.
    ;
    Schreutelkamp, R.
    ;
    Pawlak, Bartek  
    Journal article
    2008, Journal of Vacuum Science and Technology B, (26) 1, p.281-285

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