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Browsing by Author "Thomas, Elisabeth"

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    Mechanistic and electrochemical aspects of copper and cobalt post CMP cleaners for 5-7 nm nodes

    White, Mike
    ;
    White, Daniela
    ;
    Wang, Volley
    ;
    Liu, Jun
    ;
    Thomas, Elisabeth
    ;
    Frye, Don
    ;
    Lieten, Ruben  
    Proceedings paper
    2017, Surface Preparation and Cleaning Conference - SPCC, 28/03/2017, p.267-274

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