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    FUSI specific yield monitoring enabling improved circuit performance and fast feedback to production

    Chiarella, Thomas  
    ;
    Rosmeulen, Maarten  
    ;
    Tigelaar, Howard
    ;
    Kerner, Christoph  
    ;
    Nackaerts, Axel
    Proceedings paper
    2007-03, 20th IEEE International Conference on Microelectronic Test Structures - ICMTS, 20/03/2007, p.33-36

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