Browsing by Author "Timmermans, Marina Y."
Now showing 1 - 1 of 1
- Results Per Page
- Sort Options
Publication Actinic inspection of the extreme ultraviolet optical parameters of lithographic materials enabled by a table-top, coherent extreme ultraviolet source
Journal article2024, JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3, (23) 4, p.Art. 041406