Actinic inspection of the extreme ultraviolet optical parameters of lithographic materials enabled by a table-top, coherent extreme ultraviolet source

Dorney, Kevin; Holzmeier, Fabian; Kissoon, Nicola N.; Witting Larsen, Esben; Singh, Dhirendra; Arvind, Shikhar; Santra, Sayantani; Fallica, Roberto; Timmermans, Marina Y.; Pollentier, Ivan; Makhotkin, Igor A.; Philipsen, Vicky; De Gendt, Stefan; Fleischmann, Claudia; van der Heide, Paul; Petersen, John

doi:10.1117/1.JMM.23.4.041406

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Actinic inspection of the extreme ultraviolet optical parameters of lithographic materials enabled by a table-top, coherent extreme ultraviolet source

Date

2024

Journal article

https://doi.org/10.1117/1.JMM.23.4.041406

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Dorney, Kevin

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Holzmeier, Fabian

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Kissoon, Nicola N.

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Witting Larsen, Esben

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Timmermans, Marina Y.

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Journal

JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3

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75 since deposited on 2025-01-09

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Acq. date: 2025-12-10

Actinic inspection of the extreme ultraviolet optical parameters of lithographic materials enabled by a table-top, coherent extreme ultraviolet source

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