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Browsing by Author "Togo Mitsuhiro,"

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    Publication

    Optimization of standard As ion implantation for NMOS Si bulk FinFETs extension

    Sasaki, Yuichiro
    ;
    De Keersgieter, An  
    ;
    Chew, Soon Aik
    ;
    Chiarella, Thomas  
    ;
    Hellings, Geert  
    Proceedings paper
    2013, 13th International Workshop on Junction Technology - IWJT, 6/06/2013, p.222-25

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