Browsing by Author "Toney, M."
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Publication Porosity in plasma enhanced chemical vapor deposited SiCOH dielectrics: a comparative study
;Grill, A. ;Patel, V. ;Rodbell, K.P. ;Huang, E. ;Baklanov, MikhaïlMoguilnikov, KonstantinJournal article2003, Journal of Applied Physics, (94) 5, p.3427-3435