Publication:
Porosity in plasma enhanced chemical vapor deposited SiCOH dielectrics: a comparative study
Date
Loading...
Journal
Abstract
Description
Metrics
Views
2023 since deposited on 2021-10-15
1last month
Acq. date: 2025-12-12
Citations
Metrics
Views
2023 since deposited on 2021-10-15
1last month
Acq. date: 2025-12-12
Citations