Skip to content
Institutional repository
Communities & Collections
Browse all items
Scientific publications
Open knowledge
Log In
Porosity in plasma enhanced chemical vapor deposited SiCOH dielectrics: a comparative study
Statistics
Statistics by Category
Download view's map
PNG
JPEG/JPG
Reports
Most viewed
Most viewed per month
Top city views
File Visits
Export Excel
Export CSV
Item
Views
Porosity in plasma enhanced chemical vapor deposited SiCOH dielectrics: a comparative study
1357