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Browsing by Author "Tonomura, O."

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    The mechanism of mobility degradation in misfets with Al2O3 gate dielectric

    Torii, K.
    ;
    Shimamoto, Yasuhiro
    ;
    Saito, S.
    ;
    Tonomura, O.
    ;
    Hiratani, M.
    ;
    Manabe, Yukiko
    Proceedings paper
    2002, Symposium on VLSI Technology: Digest of Technical Papers, 11/06/2002, p.188-189

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