Browsing by Author "Tonomura, O."
Now showing 1 - 1 of 1
- Results Per Page
- Sort Options
Publication The mechanism of mobility degradation in misfets with Al2O3 gate dielectric
;Torii, K. ;Shimamoto, Yasuhiro ;Saito, S. ;Tonomura, O. ;Hiratani, M.Manabe, YukikoProceedings paper2002, Symposium on VLSI Technology: Digest of Technical Papers, 11/06/2002, p.188-189