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The mechanism of mobility degradation in misfets with Al2O3 gate dielectric
Publication:
The mechanism of mobility degradation in misfets with Al2O3 gate dielectric
Date
2002
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Torii, K.
;
Shimamoto, Yasuhiro
;
Saito, S.
;
Tonomura, O.
;
Hiratani, M.
;
Manabe, Yukiko
;
Caymax, Matty
;
Maes, Jan
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1996
since deposited on 2021-10-14
412
item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations
Metrics
Views
1996
since deposited on 2021-10-14
412
item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations