Browsing by Author "Tonova, Diana"
Now showing 1 - 2 of 2
- Results Per Page
- Sort Options
Publication Interpretation of spectroscopic ellipsometry measurements of ultrathin dielectric layers on silicon: impact of accuracy of the silicon optical constants
Publication Single Wavelength and Spectroscopic Ellipsometry Characterization of Ultra-Thin Gate Oxides on Silicon and Comparison with Electrical Results
Oral presentation1995, WISE: Workshop International on Spectroscopic Ellipsometry; February 9-11, 1995; Erlangen, Germany.