Publication:
Single Wavelength and Spectroscopic Ellipsometry Characterization of Ultra-Thin Gate Oxides on Silicon and Comparison with Electrical Results
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1978 since deposited on 2021-09-29
1last month
Acq. date: 2026-01-07
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Metrics
Views
1978 since deposited on 2021-09-29
1last month
Acq. date: 2026-01-07
Citations