Publication:

Single Wavelength and Spectroscopic Ellipsometry Characterization of Ultra-Thin Gate Oxides on Silicon and Comparison with Electrical Results

Date

1995
Presentation
Simple item page Full metadata Statistics
 
dc.contributor.authorTonova, Diana
dc.contributor.authorDepas, Michel
dc.contributor.authorLibezny, Milan
dc.contributor.authorHeyns, Marc
dc.contributor.authorVanhellemont, Jan
dc.contributor.imecauthorHeyns, Marc
dc.date.accessioned2021-09-29T13:17:49Z
dc.date.available2021-09-29T13:17:49Z
dc.date.issued1995
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/912
dc.source.conferenceWISE: Workshop International on Spectroscopic Ellipsometry; February 9-11, 1995; Erlangen, Germany.
dc.source.conferencelocation
dc.title

Single Wavelength and Spectroscopic Ellipsometry Characterization of Ultra-Thin Gate Oxides on Silicon and Comparison with Electrical Results

dc.typeOral presentation
dspace.entity.typePublication
Files
Publication available in collections:
Presentations