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Browsing by Author "Trinkaus, H."

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    Asymmetric strain relaxation in patterned SiGe layer: a means to enhance carrier mobilities in Si cap layers

    Buca, D.
    ;
    Hollander, B.
    ;
    Feste, S.
    ;
    Lenk, S.
    ;
    Trinkaus, H.
    ;
    Mantl, S.
    ;
    Loo, Roger  
    ;
    Caymax, Matty  
    Journal article
    2007-01, Applied Physics Letters, (90) 3, p.32108
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    Enhancement of the relaxation of SiGe layers by He ion implantation using a delta-Si:C layer

    Buca, D.
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    Goryll, M.
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    Hollaender, B.
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    Trinkaus, H.
    ;
    Mantl, S.
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    Loo, Roger  
    ;
    Nguyen, Duy
    Oral presentation
    2007, MRS 2007 Spring Meeting Symposium F: Semiconductor Defect Engineering - Materials, Synthetic Structures and Devices II
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    Fabrication, doping and characterization of strained silicon on SiO2 by ion beam techniques

    Hollaender, Bernd
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    Buca, Dan
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    Trinkaus, H.
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    Mantl, Siegfried
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    Loo, Roger  
    ;
    Reiche, Manfred
    Oral presentation
    2008, 16th International Conference on Ion Beam Modifications of Materials
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    Improvement of He ion induced SiGe layer relaxation by a thin Si:C layer

    Buca, D.
    ;
    Trinkaus, H.
    ;
    Holländer, B.
    ;
    Loo, Roger  
    ;
    Nguyen, Duy
    ;
    Mantl, S.
    Proceedings paper
    2008, 4th International SiGe Technology and Device Meeting, 11/05/2008, p.40-41
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    Tensely strained silicon on SiGe produced by strain transfer

    Buca, D.
    ;
    Holländer, B.
    ;
    Trinkaus, H.
    ;
    Mantl, S.
    ;
    Carius, R.
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    Loo, Roger  
    ;
    Caymax, Matty  
    ;
    Schaefer, H.
    Journal article
    2004-09, Applied Physics Letters, (85) 13, p.2499-2501

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