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Browsing by Author "Truong, Vinh-Binh"

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    Soft X-ray reflectometry for the inspection of interlayer roughness in stacked thin film structures

    Ciesielski, Richard
    ;
    Loo, Roger  
    ;
    Shimura, Yosuke  
    ;
    Bogdanowicz, Janusz  
    ;
    Mani, Antonio
    Proceedings paper
    2024, Conference on Metrology, Inspection, and Process Control XXXVIII, FEB 26-29, 2024, p.Art. 1295507

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