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Browsing by Author "Tschukin, V."

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    Properties of silicon layers deposited from supersonic streams activated by electron-beam plasma

    Semenova, O.
    ;
    Svitasheva, S.
    ;
    Sharafutdinov, R.
    ;
    Khmel, S.
    ;
    Tschukin, V.
    ;
    Poortmans, Jef  
    Proceedings paper
    2002, Seminar on Silicon Crystal and Film Growth and Lattice Defects - SILICON 2002, 9/07/2002, p.154

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