Skip to content
Institutional repository
Communities & Collections
Browse
Site
Log In
imec Publications
Conference contributions
Properties of silicon layers deposited from supersonic streams activated by electron-beam plasma
Publication:
Properties of silicon layers deposited from supersonic streams activated by electron-beam plasma
Date
2002
Proceedings Paper
Simple item page
Full metadata
Statistics
Loading...
Loading...
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Semenova, O.
;
Svitasheva, S.
;
Sharafutdinov, R.
;
Khmel, S.
;
Tschukin, V.
;
Poortmans, Jef
;
Bilyalov, Renat
Journal
Abstract
Description
Metrics
Views
1866
since deposited on 2021-10-14
406
item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations
Metrics
Views
1866
since deposited on 2021-10-14
406
item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations