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Properties of silicon layers deposited from supersonic streams activated by electron-beam plasma
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Properties of silicon layers deposited from supersonic streams activated by electron-beam plasma
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Date
2002
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Semenova, O.
;
Svitasheva, S.
;
Sharafutdinov, R.
;
Khmel, S.
;
Tschukin, V.
;
Poortmans, Jef
;
Bilyalov, Renat
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1867
since deposited on 2021-10-14
1
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Acq. date: 2025-12-12
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Metrics
Views
1867
since deposited on 2021-10-14
1
last month
Acq. date: 2025-12-12
Citations