Publication:
Properties of silicon layers deposited from supersonic streams activated by electron-beam plasma
Date
| dc.contributor.author | Semenova, O. | |
| dc.contributor.author | Svitasheva, S. | |
| dc.contributor.author | Sharafutdinov, R. | |
| dc.contributor.author | Khmel, S. | |
| dc.contributor.author | Tschukin, V. | |
| dc.contributor.author | Poortmans, Jef | |
| dc.contributor.author | Bilyalov, Renat | |
| dc.contributor.imecauthor | Poortmans, Jef | |
| dc.contributor.orcidimec | Poortmans, Jef::0000-0003-2077-2545 | |
| dc.date.accessioned | 2021-10-14T23:08:23Z | |
| dc.date.available | 2021-10-14T23:08:23Z | |
| dc.date.issued | 2002 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/6818 | |
| dc.source.beginpage | 154 | |
| dc.source.conference | Seminar on Silicon Crystal and Film Growth and Lattice Defects - SILICON 2002 | |
| dc.source.conferencedate | 9/07/2002 | |
| dc.source.conferencelocation | Novosibirsk Russia | |
| dc.title | Properties of silicon layers deposited from supersonic streams activated by electron-beam plasma | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
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