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Browsing by Author "Tsunoda, Takaaki"

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    Forming gas anneal induced flat-band voltage shift of metal-oxide-semiconductor stacks and its link with hydrogen incorporation in metal gates

    Li, Zilan
    ;
    Schram, Tom  
    ;
    Pantisano, Luigi
    ;
    Witters, Thomas  
    ;
    Stesmans, Andre  
    ;
    Akheyar, Amal
    Journal article
    2007, Microelectronic Engineering, (84) 9_10, p.2213-2216
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    Influence of metal capping layer on the work function of Mo gated metal-oxide semiconductor stacks

    Li, Zilan
    ;
    Schram, Tom  
    ;
    Stesmans, Andre  
    ;
    Franquet, Alexis  
    ;
    Witters, Thomas  
    ;
    Pantisano, Luigi
    Journal article
    2008, Applied Physics Letters, (93) 8, p.83511
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    Investigation on molybdenum and its conductive oxides as p-type metal gate candidates

    Li, Zilan
    ;
    Schram, Tom  
    ;
    Witters, Thomas  
    ;
    Cho, Hag-Ju
    ;
    O'Sullivan, Barry  
    ;
    Yamada, Naoki
    Journal article
    2008, Journal of the Electrochemical Society, (155) 7, p.H481

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