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Forming gas anneal induced flat-band voltage shift of metal-oxide-semiconductor stacks and its link with hydrogen incorporation in metal gates
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1956 since deposited on 2021-10-16
2last month
Acq. date: 2026-03-17
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1956 since deposited on 2021-10-16
2last month
Acq. date: 2026-03-17
Citations