Browsing by Author "Tzvetan, Ivanov"
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Publication High-throughput process chain for single electron transistor devices based on field-emission scanning probe lithography and Smart Nanoimprint technology
;Lenk, Claudia ;Krivoshapkina, Yana ;Hofmann, Martin ;Lenk, Steve ;Tzvetan, IvanovRangelow, IvoJournal article2019, Journal of Vacuum Science and Technology B, (37) 2, p.21603