Browsing by Author "Uedono, A."
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Publication Origin of Voids at the SiO2/SiO2 and SiCN/SiCN Bonding Interface Using Positron Annihilation Spectroscopy and Electron Spin Resonance
Journal article2023, ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY, (12) 3, p.Art. 033002Publication Vacancy reactions near the interface between electroplated Cu and barrier metal layers studied by monoenergetic positron beams
;Uedono, A. ;Kirimura, T.; ; ; ; Oshima, N.Journal article2013, Journal of Applied Physics, (114) 7, p.74510