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Origin of Voids at the SiO2/SiO2 and SiCN/SiCN Bonding Interface Using Positron Annihilation Spectroscopy and Electron Spin Resonance

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493 since deposited on 2023-03-25
Acq. date: 2025-10-27

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869 since deposited on 2023-03-25
Acq. date: 2025-10-27

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493 since deposited on 2023-03-25
Acq. date: 2025-10-27

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869 since deposited on 2023-03-25
Acq. date: 2025-10-27

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