Publication:
Origin of Voids at the SiO2/SiO2 and SiCN/SiCN Bonding Interface Using Positron Annihilation Spectroscopy and Electron Spin Resonance
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1547 since deposited on 2023-03-25
245last month
39last week
Acq. date: 2026-08-30
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903 since deposited on 2023-03-25
3last month
Acq. date: 2026-08-30
Citations