Publication:
Origin of Voids at the SiO2/SiO2 and SiCN/SiCN Bonding Interface Using Positron Annihilation Spectroscopy and Electron Spin Resonance
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1027 since deposited on 2023-03-25
99last month
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890 since deposited on 2023-03-25
5last month
2last week
Acq. date: 2026-04-25
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