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Origin of Voids at the SiO2/SiO2 and SiCN/SiCN Bonding Interface Using Positron Annihilation Spectroscopy and Electron Spin Resonance
Publication:
Origin of Voids at the SiO2/SiO2 and SiCN/SiCN Bonding Interface Using Positron Annihilation Spectroscopy and Electron Spin Resonance
Date
2023
Journal article
https://doi.org/10.1149/2162-8777/acbe18
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Nagano, Fuya
;
Inoue, F.
;
Phommahaxay, Alain
;
Peng, Lan
;
Chancerel, Francois
;
Naser, Hasan
;
Beyer, Gerald
;
Uedono, A.
;
Beyne, Eric
;
De Gendt, Stefan
;
Iacovo, Serena
Journal
ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY
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493
since deposited on 2023-03-25
Acq. date: 2025-10-27
Views
869
since deposited on 2023-03-25
Acq. date: 2025-10-27
Citations
Metrics
Downloads
493
since deposited on 2023-03-25
Acq. date: 2025-10-27
Views
869
since deposited on 2023-03-25
Acq. date: 2025-10-27
Citations