Publication:
Origin of Voids at the SiO2/SiO2 and SiCN/SiCN Bonding Interface Using Positron Annihilation Spectroscopy and Electron Spin Resonance
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964 since deposited on 2023-03-25
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887 since deposited on 2023-03-25
2last month
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Acq. date: 2026-04-06
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