Publication:
Origin of Voids at the SiO2/SiO2 and SiCN/SiCN Bonding Interface Using Positron Annihilation Spectroscopy and Electron Spin Resonance
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1064 since deposited on 2023-03-25
93last month
Acq. date: 2026-05-09
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894 since deposited on 2023-03-25
7last month
Acq. date: 2026-05-09
Citations