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Browsing by Author "Ungar, F."

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    Comprehensive electromigration studies of dual-damascene Cu interconnects with ALD WCxNy barriers

    Bruynseraede, Christophe
    ;
    Fisher, A.H.
    ;
    Ungar, F.
    ;
    Schuhmacher, Jorg
    ;
    Sutcliffe, Victor
    Proceedings paper
    2004, Proceedings of the IEEE International Interconnect Technology Conference, 7/06/2004, p.12-14

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