Browsing by Author "Ungar, F."
Now showing 1 - 1 of 1
- Results Per Page
- Sort Options
Publication Comprehensive electromigration studies of dual-damascene Cu interconnects with ALD WCxNy barriers
;Bruynseraede, Christophe ;Fisher, A.H. ;Ungar, F. ;Schuhmacher, JorgSutcliffe, VictorProceedings paper2004, Proceedings of the IEEE International Interconnect Technology Conference, 7/06/2004, p.12-14