Publication:
Comprehensive electromigration studies of dual-damascene Cu interconnects with ALD WCxNy barriers
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1949 since deposited on 2021-10-15
2last month
Acq. date: 2026-01-26
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Statistics
Views
1949 since deposited on 2021-10-15
2last month
Acq. date: 2026-01-26
Citations