Repository logo Institutional repository
  • Communities & Collections
  • Scientific publicationsOpen knowledge
Search repository
High contrast
  1. Home
  2. Browse by Author

Browsing by Author "Ungur, Elisaveta"

Filter results by typing the first few letters
Now showing 1 - 1 of 1
  • Results per page
  • Sort Options
  • Loading...
    Thumbnail Image
    Publication

    Atomic layer deposition of tantalum oxide and tantalum silicate from TaCl5, SiCl4, and O3: growth behaviour and film characteristics

    Han, Jeong Hwan
    ;
    Ungur, Elisaveta
    ;
    Franquet, Alexis  
    ;
    Opsomer, Karl  
    ;
    Conard, Thierry  
    Journal article
    2013-07, Journal of Materials Chemistry C, (1) 37, p.5981-5989

Follow imec on

VimeoLinkedInFacebook

The repository

  • Contact us
  • Policy
  • About imec
Privacy statement | Cookie settings