Browsing by Author "Urabe, Keiichiro"
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Publication Cryo-etching for integration in micro-electronic : Silicon deep etch for contact and low-k integration in Back end of line (BEOL)
;Chanson, Romain ;Lefaucheux, Philippe ;Dussart, Remi ;Shen, PengUrabe, KeiichiroMeeting abstract2017, iplasmaNano-VIII: 8th International Conference on Plasma Nanoscience, 2/07/2017, p.77