Browsing by Author "Urbach, H. P."
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Publication Characterization of silicon oxynitride films by grazing-emission X-ray fluorescence spectrometry
Journal article2000, Thin Solid Films, (359) 2, p.197-202Publication Grazing-emission x-ray fluorescence spectrometry: a novel tool for surface contamination analysis and thin film metrology
; ; Proceedings paper1998, Semiconductor Silicon 1998. Proceedings of the 8th International Symposium on Silicon Materials Science and Technology, 4/05/1998, p.1511-1523