Browsing by Author "Urbach, Paul"
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Publication Modelling and extended characterization of sensitive optical micro-machined ultrasound sensors (OMUS) based on a silicon photonic ring resonator on an acoustical membrane
Proceedings paper2019, 23rd Annual Symposium of the IEEE Photonics Benelux Chapter, 15/11/2018Publication Optical micro-machined ultrasound sensors with a silicon photonic resonator in a buckled acoustical membrane
Proceedings paper2019, 20th Int. Conf. on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, 24/03/2019, p.1-7