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Browsing by Author "Urbanowicz, Adam M."

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    Scatterometry and X-ray metrology for in-line control of spin-transfer torque magnetic random access memory (STT-MRAM) devices

    Crotti, Davide  
    ;
    Swerts, Johan  
    ;
    Yasin, Farrukh  
    ;
    Jossart, Nico  
    ;
    Souriau, Laurent  
    ;
    Kundu, Shreya  
    Oral presentation
    2018, SPIE Advanced Lithography Conference

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