Scatterometry and X-ray metrology for in-line control of spin-transfer torque magnetic random access memory (STT-MRAM) devices

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Author(s)

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Souriau, Laurent

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Urbanowicz, Adam M.

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Figueiro, Nivea

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Sendelbach, Matthew

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Kar, Gouri Sankar

Metrics

1973 since deposited on 2021-10-25

Acq. date: 2025-10-23