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Browsing by Author "Uwamahoro, Olivier"

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    Etch rates of Ge, GaAs and InGaAs in acids, bases and peroxide based mixtures

    Sioncke, Sonja
    ;
    Brunco, David
    ;
    Meuris, Marc  
    ;
    Uwamahoro, Olivier
    ;
    Van Steenbergen, Jan  
    Proceedings paper
    2008, SiGe, Ge, and Related Compounds 3: Materials, Processing, and Devices, 13/10/2008, p.451-460

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