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Etch rates of Ge, GaAs and InGaAs in acids, bases and peroxide based mixtures
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1911 since deposited on 2021-10-17
1last month
Acq. date: 2026-02-27
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Statistics
Views
1911 since deposited on 2021-10-17
1last month
Acq. date: 2026-02-27
Citations