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Browsing by Author "Vaca, L. M."

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    Impact of dummy metal structures on post oxide CMP planarization

    Gillot, Christophe
    ;
    De Backer, E.
    ;
    Grillaert, Joost
    ;
    Heylen, Nancy  
    ;
    Vaca, L. M.
    ;
    Blavier, G.
    Proceedings paper
    1999, 4th International Chemical Mechanical Planarization for ULSI Multilevel Interconnection Conference - CMP-MIC, 11/02/1999, p.413-416

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