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Impact of dummy metal structures on post oxide CMP planarization
Publication:
Impact of dummy metal structures on post oxide CMP planarization
Date
1999
Proceedings Paper
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3427.pdf
436.44 KB
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Gillot, Christophe
;
De Backer, E.
;
Grillaert, Joost
;
Heylen, Nancy
;
Vaca, L. M.
;
Blavier, G.
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Abstract
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2018
since deposited on 2021-10-06
Acq. date: 2025-10-23
Citations
Metrics
Views
2018
since deposited on 2021-10-06
Acq. date: 2025-10-23
Citations