Browsing by Author "Vaenkatesan, V."

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Impact of an etched EUV mask black border on imaging and overlay

Davydova, N.
;
de kruif, R.
;
Fukugami, N.
;
Kondo, S.
;
Philipsen, Vicky
;
Van Setten, E.
;
Connolly, B.
Proceedings paper
2012, Photomask Technology, 10/09/2012, p.852206
Understanding of Out-of-Band DUV light in EUV lithography: controlling impact on imaging and mitigation strategies

Davydova, Natalia
;
Kottumakulal, Ram
;
Hageman, J.
;
McNamara, J.
;
Hoefnagels, Rik
Proceedings paper
2015, 31st European Mask and Lithography Conference, 22/06/2015, p.96610B