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Browsing by Author "Vaida, Selim"

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    Improved plasma resistance for porous low-k dielectrics by pore stuffing approach

    Zhang, Liping  
    ;
    de Marneffe, Jean-Francois  
    ;
    Heyne, Markus
    ;
    Naumov, Sergej
    ;
    Sun, Yiting  
    Journal article
    2015, ECS Journal of Solid State Science and Technology, (4) 1, p.N3098-N3107

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