Browsing by Author "Vajda, Felim"
Now showing 1 - 2 of 2
- Results Per Page
- Sort Options
Publication Effect of 147nm photons on porous Organo-Silicon Glass materials and damage improvement by optimized Cu/low-k integration approaches
Meeting abstract2014, AVS 61st International Symposium and Exhibition, 9/11/2014, p.PS-MoM4Publication Vacuum ultra-violet damage and damage mitigation for plasma processing of highly porous organosilicate glass dielectrics
Journal article2015, Journal of Applied Physics, (118) 13, p.133302