Browsing by Author "Van Alphen, Senne"
Now showing 1 - 1 of 1
- Results per page
- Sort Options
Publication Wet etching of TiN in 1-D and 2-D confined nano-spaces of FinFET transistors
Journal article2018, Microelectronic Engineering, 200, p.56-61
Wet etching of TiN in 1-D and 2-D confined nano-spaces of FinFET transistors