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Browsing by Author "Van Alphen, Senne"

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    Wet etching of TiN in 1-D and 2-D confined nano-spaces of FinFET transistors

    Vereecke, Guy  
    ;
    De Coster, Hanne  
    ;
    Van Alphen, Senne
    ;
    Carolan, Patrick  
    ;
    Bender, Hugo  
    Journal article
    2018, Microelectronic Engineering, 200, p.56-61

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