Browsing by Author "Van Bockstael, Charlotte"
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Publication Stress evolution during Ni-Si compound formation for fully silicided (FUSI) gates
;Torregiani, Cristina ;Van Bockstael, Charlotte ;Detavernier, ChristopheLavoie, ChristianJournal article2007, Microelectronic Engineering, (84) 11, p.2533-2536