Publication:
Stress evolution during Ni-Si compound formation for fully silicided (FUSI) gates
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1927 since deposited on 2021-10-16
3last month
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Acq. date: 2026-08-10
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Statistics
Views
1927 since deposited on 2021-10-16
3last month
1last week
Acq. date: 2026-08-10
Citations