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Browsing by Author "Van Cauwenberghe, M."

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    Resist strip and Cu diffusion barrier etch in Cu BEOL integration schemes in a Mattson Highlands chamber

    Mannaert, Geert  
    ;
    Van Cauwenberghe, M.
    ;
    Schmidt, Michael
    ;
    Van Aelst, Joke  
    ;
    Hendrickx, Dirk  
    Oral presentation
    2002, UCPSS - Ultra Clean Processing Technology Symposium

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