Publication:

Resist strip and Cu diffusion barrier etch in Cu BEOL integration schemes in a Mattson Highlands chamber

Date

2002

Presentation

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Author(s)

Mannaert, Geert

;

Van Cauwenberghe, M.

;

Schmidt, Michael

;

Van Aelst, Joke

;

Hendrickx, Dirk

;

Stucchi, Michele

;

Conard, Thierry

;

Vanhaelemeersch, Serge

;

Boullart, Werner

Statistics

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Acq. date: 2026-02-24