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Resist strip and Cu diffusion barrier etch in Cu BEOL integration schemes in a Mattson Highlands chamber
Publication:
Resist strip and Cu diffusion barrier etch in Cu BEOL integration schemes in a Mattson Highlands chamber
Date
2002
Presentation
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Mannaert, Geert
;
Van Cauwenberghe, M.
;
Schmidt, Michael
;
Van Aelst, Joke
;
Hendrickx, Dirk
;
Stucchi, Michele
;
Conard, Thierry
;
Vanhaelemeersch, Serge
;
Boullart, Werner
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1987
since deposited on 2021-10-14
Acq. date: 2025-10-23
Citations
Metrics
Views
1987
since deposited on 2021-10-14
Acq. date: 2025-10-23
Citations